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- Title:
Fabrication of Fresnel zone plates for hard X-rays
- Author(s):
- Jefimovs, K.; Bunk, O.; Pfeiffer, F.; Grolimund, D.; van der Veen, J.F.; David, C.
- Journal title:
- Microelectronic Engineering
- Year:
- 2007
- Journal volume:
- 84
- Journal issue:
- 5-8
- Pages contribution:
- 1467-1470
- Fulltext / DOI:
- doi:10.1016/j.mee.2007.01.112
- Publisher:
- Elsevier BV
- Date of publication:
- 01.05.2007
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