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- Title:
Fabrication of diffraction gratings for hard X-ray phase contrast imaging
- Author(s):
- David, C.; Bruder, J.; Rohbeck, T.; Grünzweig, C.; Kottler, C.; Diaz, A.; Bunk, O.; Pfeiffer, F.
- Journal title:
- Microelectronic Engineering
- Year:
- 2007
- Journal volume:
- 84
- Journal issue:
- 5-8
- Pages contribution:
- 1172-1177
- Fulltext / DOI:
- doi:10.1016/j.mee.2007.01.151
- Publisher:
- Elsevier BV
- Date of publication:
- 01.05.2007
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