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Title:

Nanoscale patterning at the Si/SiO2/graphene interface by focused He+ beam

Document type:
Zeitschriftenaufsatz
Author(s):
Böttcher, Artur; Schwaiger, Ruth; Pazdera, Tobias M; Exner, Daniela; Hauns, Jakob; Strelnikov, Dmitry; Lebedkin, Sergei; Gröger, Roland; Esch, Friedrich; Lechner, Barbara A J; Kappes, Manfred M
Journal title:
Nanotechnology
Year:
2020
Journal volume:
31
Journal issue:
50
Pages contribution:
505302
Fulltext / DOI:
doi:10.1088/1361-6528/abb5cf
Publisher:
IOP Publishing
E-ISSN:
0957-44841361-6528
Date of publication:
06.10.2020
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