An overview about current research topics at the Department of Hybrid Electronic Systems (HES) at the TU München will be given. HES is focusing on the applications and integration of new materials (like carbon nanotubes, graphene, oxides) in electronic applications. Semiconducting carbon nanotubes will be discussed not only in the context of transistors but also as excellent sensor materials. Graphene layers will be discussed predominantly in applications as interconnect materials and membranes. HES is able to grow this carbon layers on wafers with diameters up to 200 mm. By employing thin carbon layers as contact materials, it is demonstrated that the ESD stability of diodes and contacts to semiconductors is significantly increased. While a standard diode is destroyed by 5 ESD pulses, the carbon-modified diode survives at least one million pulses, which is a significant improvement. Other applications like capacitors, Through-Silicon-Vias (TSV) with via-first approach and membranes will be discussed. Another point of activities is focusing on design and material aspects of resistive memories (ReRAM) which are investigated as stand-alone (NAND-successor) or for embedded (Flash) applications.      «

An overview about current research topics at the Department of Hybrid Electronic Systems (HES) at the TU München will be given. HES is focusing on the applications and integration of new materials (like carbon nanotubes, graphene, oxides) in electronic applications. Semiconducting carbon nanotubes will be discussed not only in the context of transistors but also as excellent sensor materials. Graphene layers will be discussed predominantly in applications as interconnect materials and membranes...     »