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- Title:
System-Level Modeling of Silicon Microphones Including Distributed Effects
- Document type:
- Konferenzbeitrag
- Author(s):
- Kuenzig, T.; Schrag, G.; Nawaz, M.; Herrmann, M.; Dehe, A.; Wachutka, G.
- Book / Congress title:
- EUROSENSORS 2014, the XXVIII edition of the conference series
- Congress (additional information):
- Brescia, Italy, Sept. 7-10, 2014
- Publisher:
- Elsevier Procedia Engineering
- Year:
- 2014
- Language:
- en
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