Influence of surface structure on shape and roughness measurement using two-wavelength speckle interferometry

Document type:: Konferenzbeitrag
Author(s):: Bodendorfer, T.; Mayinger, P.; Koch, A.W.
Title:: Influence of surface structure on shape and roughness measurement using two-wavelength speckle interferometry
Book / Congress title:: SPIE Optical Metrology 2013, Modeling Aspects in Optical Metrology IV
Congress (additional information):: Munich, Germany, 13.05.2013, conference vol. 8789, paper no. 8789-8, doi:10.1117/12.2020270, http://dx.doi.org/10.1117/12.2020270
Volume:: vol. 8789
Date of congress:: 13.05.2013
Year:: 2013
Reviewed:: ja
Language:: en
Fulltext / DOI:: doi:http://dx.doi.org/10.1117/12.2020270
Semester:: SS 13
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