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Title:

Large-Area Fabrication of Antennas and Nanodiodes

Document type:
Buchbeitrag
Author(s):
Bareiß, M.; Kälblein, D.; Krenz, P.M.; Zschieschang, U.; Klauk, H.; Scarpa, G.; Fabel, B.; Porod, W.; Lugli, P.
Abstract:
The conventional fabrication method in semiconductor technology or nanoelectronics is electron beam lithography. We present a new fabrication method that enables the fabrication of high amount microscale and nanoscale devices on various substrates, namely, nanotransfer printing. Using this technique, we produced millions of nanoscale metal-insulator-metal diodes which represent rectifying devices in the terahertz regime and thousands of antenna structures that are sensitive in the wavelength reg...     »
Book title:
Rectenna Solar Cells 2013, pp 297-311
Publisher:
Springer Vieweg
Year:
2013
Quarter:
3. Quartal
Year / month:
2013-07
Month:
Jul
Pages:
297-311
Print-ISBN:
978-1-4614-3715-4
E-ISBN:
978-1-4614-3716-1
Language:
en
DOI:
doi:10.1007/978-1-4614-3716-1_14
WWW:
http://link.springer.com/chapter/10.1007/978-1-4614-3716-1_14
Format:
Text
 BibTeX