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Title:

50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength

Document type:
Zeitschriftenaufsatz
Author(s):
T. Gruendl; K. Zogal; P. Debernardi; C. Gierl; C. Grasse; K. Geiger; R. Meyer; G. Boehm; M.-C. Amann; P. Meissner and F. Kueppers
Journal title:
Semiconductor science and technology
Year:
2013
Journal volume:
28
Journal issue:
1
Pages contribution:
012001
Reviewed:
ja
Fulltext / DOI:
doi:10.1088/0268-1242/28/1/012001
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