Empirical modeling of the refractive index for (AlGaIn)As lattice matched to InP

Document type:: Zeitschriftenaufsatz
Author(s):: Grasse, C., Böhm, G., Müller, M., Gründl, T., Meyer, R., Amann, M. C.
Title:: Empirical modeling of the refractive index for (AlGaIn)As lattice matched to InP
Journal title:: Semiconductor science and technology
Year:: 2010
Year / month:: 2010-03
Quarter:: 1. Quartal
Month:: Mar
Journal issue:: 25/4
Reviewed:: ja
Language:: en
Fulltext / DOI:: doi:doi:10.1088/0268-1242/25/4/045018
WWW:: http://iopscience.iop.org/0268-1242/25/4/045018/
Status:: published (reviewed)
Semester:: SS 02
TUM Institution:: Lehrstuhl für Halbleitertechnologie (E26)
Format:: Text
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