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Title:

Solidly Mounted Resonators with Layer-Transferred AlN using Sacrificial Crystalline Surfaces

Author(s):
Abd Allah,Mohamed AND Robert Thalhammer AND Jyrki Kaitila AND Thomas Herzog AND Werner Weber AND Doris Schmitt-Landsiedel
Pages contribution:
375-378
Book / Congress title:
IEEE Proceedings of European Solid-State Device Research Conference ESSDERC
Year:
2009
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