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Title:

Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions

Author(s):
Niessner, M.; Schrag, G.; Wachutka, G.; Iannacci, J.; Reutter, T.; Mulatz, H.
Pages contribution:
618 - 621
Abstract:
We present a physically-based multi-energy domain coupled model that allows for the predictive simulation of the dynamic response of electrostatically controlled and viscously damped RF-MEMS switches. The coupling effects occurring during dynamic operation, namely increased damping due to the decreasing gap height and electrostatic spring softening are correctly implemented in the model and, therefore, accurately reproduced. The model is able to account for varying ambient pressure conditions an...     »
Keywords:
RF-MEMS switch
Book / Congress title:
Proceedings of Eurosensors XXIII, September 6-9 (Eurosensors 2009)
Volume:
1
Publisher address:
Lausanne, Switzerland
Year:
2009
Bookseries volume:
1
Fulltext / DOI:
doi:DOI: 10.1016/j.proche.2009.07.154
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