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- Autor(en):
- Niessner, M.; Schrag, G.; Wachutka, G.; Iannacci, J.; Reutter, T.; Mulatz, H.
- Titel:
- Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions
- Seitenangaben Beitrag:
- 618 - 621
- Abstract:
- We present a physically-based multi-energy domain coupled model that allows for the predictive simulation of the dynamic response of electrostatically controlled and viscously damped RF-MEMS switches. The coupling effects occurring during dynamic operation, namely increased damping due to the decreasing gap height and electrostatic spring softening are correctly implemented in the model and, therefore, accurately reproduced. The model is able to account for varying ambient pressure conditions an... »
- Stichworte:
- RF-MEMS switch
- Kongress- / Buchtitel:
- Proceedings of Eurosensors XXIII, September 6-9 (Eurosensors 2009)
- Band / Teilband / Volume:
- 1
- Verlagsort:
- Lausanne, Switzerland
- Jahr:
- 2009
- Serienbandnummer:
- 1
- Volltext / DOI:
- doi:DOI: 10.1016/j.proche.2009.07.154
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