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Title:

Properties of Tungsten Thin Films Produced with the RF-Sputtering Technique

Document type:
Zeitschriftenaufsatz
Author(s):
Roth, S.; Ciemniak, C.; Coppi, C.; Feilitzsch, F.v.; Gütlein, A.; Isaila, C.; Lanfranchi, J.-C.; Pfister, S.; Potzel, W.; Westphal, W.
Journal title:
Journal of Low Temperature Physics
Year:
2008
Journal volume:
151
Journal issue:
1 -2
Pages contribution:
216 -- 222
Language:
en
Format:
Text
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