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Title:

Fabrication of large-grained thin polycrystalline silicon films on foreign substrates by titanium-assisted metal-induced layer exchange

Author(s):
Antesberger, T.; Wassner, T. A.; Kashani, M.; Scholz, M.; Lechner, R.; Matich, S.; Stutzmann, M.
Journal title:
J. Appl. Phys.
Year:
2012
Journal volume:
112
Journal issue:
12
Pages contribution:
123509
Fulltext / DOI:
doi:10.1063/1.4768542
Publisher:
American Institute of Physics (AIP)
Date of publication:
01.01.2012
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