A combined ion- sputtering and electron-beam annealing device for the in vacuo postpreparation of scanning probes

Eder, G.; Schlögl, S.; Macknapp, K.; Heckl, W. M.; Lackinger, M.

Document type:: Zeitschriftenaufsatz
Author(s):: Eder, G.; Schlögl, S.; Macknapp, K.; Heckl, W. M.; Lackinger, M.
Title:: A combined ion- sputtering and electron-beam annealing device for the in vacuo postpreparation of scanning probes
Journal title:: Rev. Sci. Instrum.
Year:: 2011
Journal volume:: 82
Notes:: 033701
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