A combined ion- sputtering and electron-beam annealing device for the in vacuo postpreparation of scanning probes

Eder, G.; Schlögl, S.; Macknapp, K.; Heckl, W. M.; Lackinger, M.

Dokumenttyp:: Zeitschriftenaufsatz
Autor(en):: Eder, G.; Schlögl, S.; Macknapp, K.; Heckl, W. M.; Lackinger, M.
Titel:: A combined ion- sputtering and electron-beam annealing device for the in vacuo postpreparation of scanning probes
Zeitschriftentitel:: Rev. Sci. Instrum.
Jahr:: 2011
Band / Volume:: 82
Hinweise:: 033701
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