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Title:

Silicon-on-insulator based nanopore cavity arrays for lipid membrane investigation

Document type:
Zeitschriftenaufsatz
Author(s):
Buchholz, K.; Tinazli, A.; Kleefen, A.; Dorfner, D.; Pedone, D.; Rant, U.; Tampé, R.; Abstreiter, G.; Tornow, M.
Abstract:
We present the fabrication and characterization of nanopore microcavities for the investigation of transport processes in suspended lipid membranes. The cavities are situated below the surface of silicon-on-insulator (SOI) substrates. Single cavities and large area arrays were prepared using high resolution electron-beam lithography in combination with reactive ion etching (RIE) and wet chemical sacrificial underetching. The locally separated compartments have a circular shape and allow the encl...     »
Journal title:
Nanotechnology. 2008 Nov 5; 19(44):445305 2008-10
Year:
2008
Year / month:
2008-10
Quarter:
4. Quartal
Month:
Oct
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:10.1088/0957-4484/19/44/445305
WWW:
http://iopscience.iop.org/article/10.1088/0957-4484/19/44/445305/meta%3Bjsessionid%3D6B0F47DCB07D692DE13AF1AB560138E7.c3.iopscience.cld.iop.org
Publisher:
IOP Science Publishing
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