High-Temperature Polymers for Advanced Microelectronics

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Document type:: Zeitschriftenaufsatz
Author(s):: Maier, Gerhard; Banerjee, Susanta; Haußmann, Jörg; Sezi, Recai
Title:: High-Temperature Polymers for Advanced Microelectronics
Journal title:: High Performance Polymers
Year:: 2001
Journal volume:: 13
Journal issue:: 2
Pages contribution:: 107-S115
Fulltext / DOI:: doi:10.1088/0954-0083/13/2/310
Publisher:: Sage Publications
Print-ISSN:: 0954-0083
E-ISSN:: 1361-6412
Notes:: Dieser Beitrag ist mit Zustimmung des Rechteinhabers aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich. This publication is with permission of the rights owner freely accessible due to an Alliance licence and a national licence (funded by the DFG, German Research Foundation) respectively.
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