Porous silicon formation during Au-catalyzed etching

Algasinger, Michael; Bernt, Maximilian; Koynov, Svetoslav; Stutzmann, Martin

doi:10.1063/1.4873892

Title:: Porous silicon formation during Au-catalyzed etching
Author(s):: Algasinger, Michael; Bernt, Maximilian; Koynov, Svetoslav; Stutzmann, Martin
Journal title:: J. Appl. Phys.
Year:: 2014
Journal volume:: 115
Journal issue:: 16
Pages contribution:: 164308
Fulltext / DOI:: doi:10.1063/1.4873892
Publisher:: American Institute of Physics (AIP)
Date of publication:: 28.04.2014
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