This thesis presents a CMOS integrated sensor for impedance measurements with cultured cells. A model of the impedance under study, comprising contributions of the electrode, the electrolyte, and the cells, was developed using a combination of analytical and numerical techniques. Based on the model, boundary conditions were derived and a suitable conversion principle was chosen and implemented. The sensor was produced in a 0.35 micron standard CMOS technology with additional process steps for manufacturing gold electrodes. The chip features 64 positions for sensing the cellular impedance, which are addressed and read out by an integrated circuit. The performance of the sensor was verified experimentally. Cell adhesion and death could be detected reliably, and different levels of local cell coverage could be resolved. Due to the localized measurement, fluctuations of the impedance caused by movements of the cells could also be resolved.
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This thesis presents a CMOS integrated sensor for impedance measurements with cultured cells. A model of the impedance under study, comprising contributions of the electrode, the electrolyte, and the cells, was developed using a combination of analytical and numerical techniques. Based on the model, boundary conditions were derived and a suitable conversion principle was chosen and implemented. The sensor was produced in a 0.35 micron standard CMOS technology with additional process steps for ma...
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