User: Guest  Login
Document type:
Zeitschriftenaufsatz 
Author(s):
Nagel, R. D.; Filser, S.; Zhang, T.; Manzi, A.; Schönleber, K.; Lindsly, J.; Zimmermann, J.; Maier, T. L.; Scarpa, G.; Krischer, K.; Lugli, P 
Title:
Nanoimprint methods for the fabrication of macroscopic plasmonically active metal nanostructures 
Abstract:
In this article, we present a refined nanostructuring method, lift-off nanoimprint lithography (LO-NIL), which allows the deposition of high-quality metal nanostructures due to a bilayer resist process and compare it to nano-transfer printing (nTP), a purely additive metal printing technique. LO-NIL and nTP are used as accurate methods for the fabrication of ordered plasmonic metal nanostructure arrays on semiconducting substrates over large areas using the example of gold nanodisks on silicon....    »
 
Keywords:
catalysis,nano transfer printing,nanoimprint 
Journal title:
Journal of Applied Physics > Volume 121, Issue 8 > 10.1063/1.4976860 2017-02 
Year:
2017 
Year / month:
2017-02 
Quarter:
1. Quartal 
Month:
Feb 
Language:
en 
Publisher:
AIP Publishing LLC 
Print-ISSN:
0021-8979