Manz, J.; Bosetti, G.; Dehe, A.; Schrag, G
A novel silicon "star-comb" microphone concept for enhanced signal-to-ratio: modeling, design and first prototype
pp. 69-70
Proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems 2017
Kaohsiung, Taiwan (Transducers)
2017