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Document type:
Konferenzbeitrag 
Author(s):
Anzinger S., Manz J., Dehe A., Schrag G 
Title:
A Comb-Based Capacitive MEMS Microphone with High Signal-to-Noise Ratio: Modeling and Noise-Level-Analysis 
Book / Congress title:
Proceedings of the Eurosensors 2017/Multidisciplinary Publishing Institute Proceedings, Vol. 1, 2017 
Congress (additional information):
Paris, France 
Volume:
Vol. 1 
Date of congress:
3–6 September 2017 
Year:
2017 
Year / month:
2017-09 
Month:
Sep 
Pages:
pp. 346 
Language:
en 
TUM Institution:
Lehrstuhl für Technische Elekrophysik 
Ingested:
29.12.2017