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Title:

OT1.173 - High-Fidelity Modeling of Harmonic Distortions in Piezoelectric MEMS Microphones with a Corrugated Membrane

Document type:
Konferenzbeitrag
Author(s):
Schiller, F.; Bretthauer, C.; Bogner, A.; Bosetti, G.; Krenzer, M.; Gierl, K.; Haupt, C.; Heiss, H.
Pages contribution:
33-34
Abstract:
We present a high-fidelity, computationally efficient approach for modeling harmonic distortions in piezoelectric MEMS microphones featuring a fully-clamped corrugated membrane design. The described method correctly predicts the total harmonic distortion (THD) of two manufactured design variants, thereby paving the way for THD optimization throughout the design process. Remarkably, one of the design variants shows a THD of 1% at a very high sound pressure level (SPL) of 130 dBSPL, thus out-perfo...     »
Keywords:
Harmonic Distortions; Hi-Fi; High-Fidelity; MEMS; Schiller, F.; Bretthauer, C.; Bogner, A.; Bosetti, G.; Krenzer, M.; Gierl, K.; Haupt, C.; Heiss, H.; Microphon; Mikrofon; Membrane; design; THD; SPL; 130 dB; piezoelectric; SBP; computationally
Dewey Decimal Classification:
620 Ingenieurwissenschaften
Book / Congress title:
Lectures
Congress (additional information):
EUROSENSORS XXXVI
Date of congress:
01-04.09.2024
Publisher:
AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf
Date of publication:
01.01.2024
Year:
2024
E-ISBN:
978-3-910600-03-4
Fulltext / DOI:
doi:10.5162/eurosensorsxxxvi/ot1.173
TUM Institution:
CIT, EE, Professorship of Microsensors and Actuators
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