- Title:
Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Bredol, Philipp; David, Felix; Jagtap, Nagesh S.; Klaß, Yannick S.; Astakhov, Georgy V.; Erbe, Artur; Weig, Eva M.
- Year:
- 2024
- Fulltext / DOI:
- doi:10.48550/ARXIV.2405.02035
- Publisher:
- arXiv
- Date of publication:
- 01.01.2024
- BibTeX