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Title:

Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators

Document type:
Zeitschriftenaufsatz
Author(s):
Bredol, Philipp; David, Felix; Jagtap, Nagesh S.; Klaß, Yannick S.; Astakhov, Georgy V.; Erbe, Artur; Weig, Eva M.
Year:
2024
Fulltext / DOI:
doi:10.48550/ARXIV.2405.02035
Publisher:
arXiv
Date of publication:
01.01.2024
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