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Document type:
Konferenzbeitrag
Author(s):
Sattler, S.; Felgentreff, T.; Russer, P.
Title:
A coplanar millimeterwave resonator on silicon
Abstract:
A coplanar waveguide (CPW) resonator built with a completely coplanar technique on a grounded silicon substrate is discussed. The input impedance is investigated experimentally and numerically. The passive planar structure is extensively studied using a space-domain full-wave analysis method. The resonator is fed by a coplanar transmission line through a capacitive gap and shows a marked resonance at the fundamental coplanar waveguide mode. Calculated and measured data agree to better than 5%.
Keywords:
MMIC, MIMIC, resonators, silicon, electric impedance, input impedance, CPW, coplanar waveguide, strip line components, coplanar transmission line, capacitive gap, coplanar millimeterwave resonator, grounded Si substrate, MM-wave type, passive planar structure, space-domain full-wave analysis
Book / Congress title:
Microwave and Millimeter-Wave Monolithic Circuits Symposium, 1993. Digest of Papers., IEEE 1993
Year:
1993
Pages:
57--60
Fulltext / DOI:
doi:10.1109/MCS.1993.247477
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