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- Titel:
A coplanar millimeterwave resonator on silicon
- Dokumenttyp:
- Konferenzbeitrag
- Autor(en):
- Sattler, S.; Felgentreff, T.; Russer, P.
- Abstract:
- A coplanar waveguide (CPW) resonator built with a completely coplanar technique on a grounded silicon substrate is discussed. The input impedance is investigated experimentally and numerically. The passive planar structure is extensively studied using a space-domain full-wave analysis method. The resonator is fed by a coplanar transmission line through a capacitive gap and shows a marked resonance at the fundamental coplanar waveguide mode. Calculated and measured data agree to better than 5%.
- Stichworte:
- MMIC, MIMIC, resonators, silicon, electric impedance, input impedance, CPW, coplanar waveguide, strip line components, coplanar transmission line, capacitive gap, coplanar millimeterwave resonator, grounded Si substrate, MM-wave type, passive planar structure, space-domain full-wave analysis
- Kongress- / Buchtitel:
- Microwave and Millimeter-Wave Monolithic Circuits Symposium, 1993. Digest of Papers., IEEE 1993
- Jahr:
- 1993
- Seiten:
- 57--60
- Volltext / DOI:
- doi:10.1109/MCS.1993.247477
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