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Titel:

Propagation characteristics of leaky surface acoustic waves for two thin metal layers on LiTaO3 substrate

Dokumenttyp:
Konferenzbeitrag
Autor(en):
Meier, H.; Russer, P.
Abstract:
Leaky surface acoustic waves (LSAWs) propagating in the crystalline X-direction of rotated Y-cuts of LiTaO3 substrates are investigated. The effect of two thin isotropic metallic films deposited on the substrate surface is rigorously taken into consideration. The relatively small bulk wave term in the partial wave solution has a phase velocity vector tilted towards the substrate at an angle of 28.5$^\textrm\textbackslashcirc\$$ referred to the substrate surface for 36$^\textrm\textbackslashcirc\...     »
Stichworte:
lithium compounds, surface acoustic waves, LiTaO3 substrate, leaky surface acoustic waves, acoustic wave velocity, metallic films, phase velocity vector, slow shear wave
Kongress- / Buchtitel:
Ultrasonics Symposium, 1991. Proceedings., IEEE 1991
Jahr:
1991
Seiten:
359--362 vol.1
Volltext / DOI:
doi:10.1109/75.93906
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