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Document type:
Zeitschriftenaufsatz 
Author(s):
T. Gruendl; K. Zogal; P. Debernardi; C. Gierl; C. Grasse; K. Geiger; R. Meyer; G. Boehm; M.-C. Amann; P. Meissner and F. Kueppers 
Title:
50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength 
Journal title:
Semiconductor science and technology 
Year:
2013 
Journal volume:
28 
Journal issue:
Pages contribution:
012001 
Reviewed:
ja