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Document type:
Konferenzbeitrag 
Contribution type:
Vortrag / Präsentation 
Author(s):
Zöpfl, T.; Wittman, F.; Schrag, G.; Wachutka, G., 
Title:
High-Fidelity 3D FEM Simulation Model for Stress Reduction in MEMS Microphones 
Pages contribution:
pp. 68-71 
Book / Congress title:
EUROSENSORS XXII 
Congress (additional information):
07.09.208 - 10.09.2008, Dresden 
Year:
2008 
Language:
de 
Format:
Text