Iannacci, J. ; Faes, A.; Künzig, T.; Niessner, M.; Wachutka, G.
Electromechanical and electromagnetic simulation of RF-MEMS complex networks based on compact modeling approach
pp. 591-594
Proceedings of TechConnect World NSTI Nanotech/Microtech 2011
NSTI NANOTECH 2011, Boston, MA, USA, June 13-16
2011