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- Title:
A Comb-Based Capacitive MEMS Microphone with High Signal-to-Noise Ratio: Modeling and Noise-Level-Analysis
- Document type:
- Konferenzbeitrag
- Author(s):
- Anzinger, S.; Manz, J.; Dehe, A.; Schrag, G.
- Book / Congress title:
- Proceedings of the Eurosensors 2017/Multidisciplinary Publishing Institute Proceedings, Vol. 1, 2017
- Congress (additional information):
- Paris, France
- Volume:
- Vol. 1
- Date of congress:
- 3–6 September 2017
- Year:
- 2017
- Year / month:
- 2017-09
- Month:
- Sep
- Pages:
- pp. 346
- Language:
- en
- TUM Institution:
- Lehrstuhl für Technische Elekrophysik
- Ingested:
- 29.12.2017
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