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Dokumenttyp:
Konferenzbeitrag
Autor(en):
Meier, H.; Schneiderbauer, B.; Russer, P.
Titel:
Propagation of leaky surface acoustic waves under thin periodic metal electrodes
Abstract:
Leaky surface acoustic waves (LSAWs) propagating under thin periodic metal gratings on anisotropic and piezoelectric substrates are investigated. The inherent physical behavior of LSAWs, consisting of coupled modes including terms decaying into the substrate and a term representing a radiating bulk wave, under thin metal strips is explained. A field theoretical analysis that fits both the mechanical and electrical periodic boundary conditions is developed. Four types of electrically connected me...     »
Stichworte:
surface acoustic waves, dispersion relations, surface acoustic wave devices, ultrasonic propagation, attenuation constant, LiTaO3 substrate, frequency dependence, dispersion relation, coupled modes, leaky surface acoustic waves, radiating bulk wave, Al-LiTaO3, anisotropic substrates, bulk wave scattering, electrically connected metal strips, mechanical surface perturbation, periodic boundary conditions, periodic metal gratings, piezoelectric substrates, thin periodic metal electrodes
Kongress- / Buchtitel:
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Jahr:
1992
Seiten:
441--444 vol.1
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