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Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Rivadeneyra, A.; Fernandez-Salmeron, J.; Audo-Acemel, M.; Lopez-Villanueva, J.A.; Capitan-Vallvey, L.F.; Palma, A.J.
Titel:
Improved manufacturing process for printed cantilevers by using water removable sacrificial substrate
Abstract:
Suspended structures are an important element in the vast majority of electromechanical systems. The definition of this kind of structures is a not totally resolved problem in printing electronics where the definition of a smooth sacrificial layer makes difficult their fabrication. Based on a previous work using a sacrificial substrate, we present in this paper a significant improvement of this technique in terms of reproducibility and yield rate. The sacrificial substrate is a commercial polyvi...     »
Stichworte:
Printed electronics; Screen printing; Cantilever beam; Flexible substrate; Sacrificial layer; Sacrificial substrate
Zeitschriftentitel:
Sensors and Actuators A: Physical Volume 235, 1 November 2015, Pages 171–181 2015-11
Jahr:
2015
Jahr / Monat:
2015-11
Quartal:
4. Quartal
Monat:
Nov
Seitenangaben Beitrag:
171--181
Sprache:
en
Volltext / DOI:
doi:10.1016/j.sna.2015.10.019
WWW:
http://www.sciencedirect.com/science/article/pii/S0924424715301813
Verlag / Institution:
Elsevier B.V.
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