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- Dokumenttyp:
- Konferenzbeitrag
- Autor(en):
- Haeberle, T.; Loghin, F.; Zschieschang, U.; Klauk, H.; Lugli, P.
- Titel:
- Carbon nanotube thin-film transistors featuring transfer-printed metal electrodes and a thin, self-grown aluminum oxide gate dielectric
- Abstract:
- We report on a novel fabrication scheme to define metal source and drain contacts for short-channel thin-film transistors utilizing a purely additive transfer-printing process. We demonstrate the viability of this approach by realizing carbon nanotube thin-film transistors featuring a very thin aluminum oxide gate dielectric The active layer of the transistors is spray-deposited from an aqueous carbon-nanotube suspension with 90% semiconducting content. Full gate control is demonstrated for gate... »
- Stichworte:
- III-V semiconductors, aluminium compounds, carbon nanotube field effect transistors, electrodes, nanofabrication, thin film transistors, three-dimensional printing, AlN, additive transfer-printing process, aqueous carbon-nanotube suspension, carbon nanotube thin-film transistors, drain contacts, fabrication scheme, full gate control, metal source, short-channel thin-film transistors, thin self-grown aluminum oxide gate dielectric, transfer-printed metal electrodes, Dielectrics, Logic gates, Meta... »
- Kongress- / Buchtitel:
- Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
- Kongress / Zusatzinformationen:
- Rome, Italy, 27-30 July 2015 2015-07
- Verlag / Institution:
- IEEE Xplore Digital Library
- Jahr:
- 2015
- Quartal:
- 3. Quartal
- Jahr / Monat:
- 2015-07
- Monat:
- Jul
- Seiten:
- 160--163
- Sprache:
- en
- Volltext / DOI:
- doi:10.1109/NANO.2015.7388946
- WWW:
- http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7388946&queryText=Carbon+nanotube+thin-film+transistors+featuring+transfer-printed+metal+electrodes+and+a+thin,+self-grown+aluminum+oxide+gate+dielectric&newsearch=true
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