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- Title:
RF-MEMS SPDT switch on silicon substrate for space applications
- Document type:
- Konferenzbeitrag
- Author(s):
- Farinelli, P.; Giacomozzi, F.; Mannocchi, G.; Marcelli, R.; Margesin, B.; Mezzanotte, P.; Nardo, S. Di; Russer, P.; Sorrentino, R.; Vitulli, F.; Vietzorreck, L.
- Abstract:
- The paper illustrates the activity carried out under an ESA contract for the development of a miniaturized RF-MEMS SPDT switch and switch matrix using micromachining technology on a silicon substrate for power applications. A manufacturing procedure, based on an eight masks process, has been set up. At present, a broadband single-pole-double-throw (SPDT) switch operating in the 0-30 GHz frequency range has been fabricated and measured. Isolation of about -40 dB and insertion loss better than -0.... »
- Keywords:
- substrates, Si, silicon, microswitches, microwave switches, silicon substrate, micromachining, fabrication process, 0 to 30 GHz, design process, broadband single-pole-double-throw switch, micromachining technology, miniaturized switch, RF-MEMS SPDT switch, space applications, switch matrix
- Book / Congress title:
- Silicon Monolithic Integrated Circuits in RF Systems, 2004. Digest of Papers. 2004 Topical Meeting on
- Year:
- 2004
- Pages:
- 151--154
- Fulltext / DOI:
- doi:10.1109/WSA.2004.1407649
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