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Document type:
Konferenzbeitrag
Author(s):
Vietzorreck, L.; Coccetti, F.; Chtchekatourov, V.; Russer, P.
Title:
Numerical methods for the high-frequency analysis of MEMS capacitive switches
Abstract:
In the present paper we analyze the high-frequency behaviour of a microelectromechanical capacitive switch by the transmission line matrix method (TLM) and by the method of lines (MoL). The numerical methods will be presented, especially the means which are necessary to avoid long calculation times and make the methods useful for an efficient design of the proposed structures. The obtained numerical results for the scattering parameters are compared with measurements in order to judge their accu...     »
Keywords:
transmission line matrix methods, semiconductor device models, S-parameters, scattering parameters, micromechanical devices, transmission line matrix method, semiconductor switches, method of lines, high-frequency analysis, calculation times, MEMS capacitive switches
Book / Congress title:
2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems Digest, Garmisch, 26-28 April 2000
Year:
2000
Pages:
123--124
Fulltext / DOI:
doi:10.1109/SMIC.2000.844314
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