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- Title:
Modeling of MEMS capacitive switches by TLM
- Document type:
- Konferenzbeitrag
- Author(s):
- Vietzorreck, L.; Coccetti, F.; Chtchekatourov, V.; Russer, P.
- Abstract:
- The high-frequency behaviour of a microelectromechanical capacitive switch is investigated using TLM. A post-processing of the time-domain signal is presented which avoids long calculation times. The calculated results of a metal membrane switch show very good agreement to results obtained by other numerical methods and measurements
- Keywords:
- transmission line matrix methods, TLM, semiconductor device models, micromechanical devices, semiconductor switches, calculation times, MEMS capacitive switches, high-frequency behaviour, metal membrane switch, time-domain signal
- Book / Congress title:
- Microwave Symposium Digest., 2000 IEEE MTT-S International
- Volume:
- 2
- Year:
- 2000
- Pages:
- 1221--1224 vol.2
- Fulltext / DOI:
- doi:10.1109/MWSYM.2000.863579
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