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Title:

Analysis of leaky surface acoustic wave reflections

Document type:
Konferenzbeitrag
Author(s):
Meier, H.; Russer, P.
Abstract:
An accurate understanding of the reflection behavior of leaky surface acoustic waves (LSAW) is of particular interest in order to develop sophisticated computer aided design (CAD) tools. Thus, we have analyzed the propagation and reflection characteristic of LSAW under periodic metal grating structures. The electrically and mechanically induced reflections, as well as the anisotropy of the substrate material, are rigorously taken into account. Consequently, the second order effects associated wi...     »
Keywords:
LiTaO3, CAD, surface acoustic wave filters, surface acoustic wave devices, ultrasonic propagation, Al, Al electrodes, CAD tools, computer aided design tools, evanescent bulk modes, leaky surface acoustic wave reflections, LiTaO3 substrate, metallization ratios, periodic metal grating structures, phase velocity shift, propagating bulk modes, propagation characteristic, reflection characteristic, ultrasonic devices, ultrasonic reflection
Book / Congress title:
Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
Year:
1993
Pages:
201--204 vol.1
Fulltext / DOI:
doi:10.1109/ULTSYM.1993.339564
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