Future Si-based analog and digital highly integrated Microwave Monolithic Integrated Circuits (MMIC) are expected to operate at frequencies up into the millimeter-wave range. Further reduction of circuit dimensions will require multilayered wiring and transmission line structures with cross-sectional dimensions of the conductors in the order of micrometers. In order to achieve further reduction in conductor losses copper is also considered for internal wiring. The exact modelling of the transmission properties of the line structures requires full-wave modelling of the electromagnetic field in the semi-conductor and insulator regions as well as within the conductors. In this paper various transmission line structures have been analyzed using the Mode Matching (MM) approach. Based on the numerical simulation transmission an equivalent network-oriented circuits are extracted.     «

Future Si-based analog and digital highly integrated Microwave Monolithic Integrated Circuits (MMIC) are expected to operate at frequencies up into the millimeter-wave range. Further reduction of circuit dimensions will require multilayered wiring and transmission line structures with cross-sectional dimensions of the conductors in the order of micrometers. In order to achieve further reduction in conductor losses copper is also considered for internal wiring. The exact modelling of the transmis...     »