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- Title:
Inline hyperspectral thickness determination of thin films using neural networks
- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Tremmel, A.J.; Weiss, R.; Schardt, M.; Koch, A.W.
- Book / Congress title:
- Proc. SPIE 10213, Hyperspectral Imaging Sensors: Innovative Applications and Sensor Standards 2017, 102130G
- Date of publication:
- 28.04.2017
- Year:
- 2017
- Quarter:
- 2. Quartal
- Year / month:
- 2017-04
- Month:
- Apr
- Reviewed:
- ja
- Language:
- en
- Publication format:
- Fulltext / DOI:
- doi:10.1117/12.2262070
- WWW:
- https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10213/1/Inline-hyperspectral-thickness-determination-of-thin-films-using-neural-networks/10.1117/12.2262070.short?SSO=1
- Semester:
- SS 17
- TUM Institution:
- Lehrstuhl für Messsystem- und Sensortechnik
- Format:
- Text
- Ingested:
- 04.01.2018
- Last change:
- 08.02.2018
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