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- Title:
Optical mapping of surface roughness by implementation of a spatial light modulator
- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Aulbach, L.; Pöller, F.; Lu, M.; Wang, S.; Koch, A.W.
- Book / Congress title:
- Proc. SPIE Volume 10373, Applied Optical Metrology II
- Organization:
- SPIE
- Date of publication:
- 23.08.2017
- Year:
- 2017
- Quarter:
- 3. Quartal
- Year / month:
- 2017-08
- Month:
- Aug
- Reviewed:
- ja
- Language:
- en
- Publication format:
- Fulltext / DOI:
- doi:10.1117/12.2270548
- WWW:
- https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10373/103730E/Optical-mapping-of-surface-roughness-by-implementation-of-a-spatial/10.1117/12.2270548.short?SSO=1
- Semester:
- SS 17
- TUM Institution:
- Lehrstuhl für Messsystem- und Sensortechnik
- Format:
- Text
- Ingested:
- 02.01.2018
- Last change:
- 08.02.2018
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