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- Title:
Optical measurement system with polarization compensation, and corresponding method
- Document type:
- Patent
- Patent number:
- US 2015/0146192 A1
- Inventor:
- Buck, T.C.; Hoffmann, L.; Müller, M.S.; Wojtech, R.
- Assignee:
- Buck, T.C.; Hoffmann, L.; Müller, M.S.; Wojtech, R.
- Patent office:
- US
- Publication date patent:
- 28.05.2015
- Year:
- 2015
- Language:
- en
- WWW:
- https://depatisnet.dpma.de/DepatisNet/depatisnet?action=pdf&docid=US020150146192A1
- TUM Institution:
- Lehrstuhl für Messsystem- und Sensortechnik
- Format:
- Text
BibTeX