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Titel:

Analysis of leaky surface acoustic wave reflections

Dokumenttyp:
Konferenzbeitrag
Autor(en):
Meier, H.; Russer, P.
Abstract:
An accurate understanding of the reflection behavior of leaky surface acoustic waves (LSAW) is of particular interest in order to develop sophisticated computer aided design (CAD) tools. Thus, we have analyzed the propagation and reflection characteristic of LSAW under periodic metal grating structures. The electrically and mechanically induced reflections, as well as the anisotropy of the substrate material, are rigorously taken into account. Consequently, the second order effects associated wi...     »
Stichworte:
LiTaO3, CAD, surface acoustic wave filters, surface acoustic wave devices, ultrasonic propagation, Al, Al electrodes, CAD tools, computer aided design tools, evanescent bulk modes, leaky surface acoustic wave reflections, LiTaO3 substrate, metallization ratios, periodic metal grating structures, phase velocity shift, propagating bulk modes, propagation characteristic, reflection characteristic, ultrasonic devices, ultrasonic reflection
Kongress- / Buchtitel:
Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
Jahr:
1993
Seiten:
201--204 vol.1
Volltext / DOI:
doi:10.1109/ULTSYM.1993.339564
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