Loghin, F.; Falco, A.; Bobinger, M.; Abdellah, A.; Becherer, M.; Lugli, P.; Rivadeneyra, A.
Large-scale spray deposition of carbon nanotube-based thin-film devices
Due to their remarkable electrical and mechanical characteristics, Carbon nanotubes (CNTs) are ideal candidates for a wide range of applications. The possibility to fabricate CNT thin-films via solution processing techniques has enabled the way to low-cost CNT thin-film devices including thin-film transistors (TFTs) and circuits, thermal and chemical sensors as well as transparent conductive films (TCFs). In this contribution, we report on a spray deposition technique, which can produce uniform, reproducible thin-films suitable for a wide range of applications. The use of non-invasive solvents (DI-H2O) as well as low processing temperatures (<65°C) permits for the process to be easily integrated into existing technology platforms. Furthermore, the resolution down to 10 CNTs/um2 per deposited layer allows for precise device engineering. In order to better display this technology, proof of concept devices were fabricated and characterized, including TFTs, chemical sensors and TCFs.
Book / Congress title:
DPG-Verhandlungen DS: Fachverband Dünne Schichten DS 17: Poster Session I DS 17.61: Poster B