Squeeze-Film Damping in Perforated Microstructures: Modeling, Simulation and Pressure-Dependent Experimental Validation

Niessner, M.; Schrag, G.; Iannacci, J.; Wachutka, G.

Document type:: Konferenzbeitrag
Contribution type:: Textbeitrag / Aufsatz
Author(s):: Niessner, M.; Schrag, G.; Iannacci, J.; Wachutka, G.
Title:: Squeeze-Film Damping in Perforated Microstructures: Modeling, Simulation and Pressure-Dependent Experimental Validation
Pages contribution:: pp. 598-601
Book / Congress title:: Proceedings of the Nanotech - NSTI 2012- Vol. 2
Congress (additional information):: June 18-21, Santa Clara, CA, USA
Publisher address:: New York
Year:: 2012
Reviewed:: ja
Language:: en
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