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Document type:
Konferenzbeitrag 
Author(s):
Reutter, T.; Schrag, G. 
Title:
Reliable Piezoelectric FEM-Simulations of MEMS Microphones: Basis for Intrinsic Stress Reduction" 
Pages contribution:
pp. 193-196 
Book / Congress title:
Proceedings of the Ninth IEEE Sensors Conference 
Congress (additional information):
Nov. 1-4, 2010, Kona, Hawaii 
Year:
2010 
Reviewed:
ja 
Language:
en 
Format:
Text