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Document type:
Konferenzbeitrag 
Author(s):
Zöpfl, T. ; Klare, S. ; Wachutka, G. ; Schrag, G. 
Title:
"Characterisation of the intrinsic stress in micromachined parylene membranes" 
Pages contribution:
pp. 73621M-1-11 
Book / Congress title:
Proceedings of SPIE: Smart Sensors, Actuators and MEMS IV 
Congress (additional information):
SPIE 2009, May 4-6 , Dresden, Germany 
Volume:
Vol. 7362 
Year:
2009 
Language:
en 
Format:
Text