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Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Weig, E.M.
Title:
High Q nanomechanical systems
Abstract:
Doubly-clamped pre-stressed silicon nitride string resonators excel as high Q nanomechanical systems enabling room temperature quality factors of several 100,000 in the 10 MHz eigenfrequency range. Dielectric transduction ideally complements the silicon nitride strings, providing an all-electrical control scheme while retaining the large mechanical quality factor [1]. It is mediated by an inhomogeneous electric field created between adjacent electrodes. The resulting gradient field pro...     »
Book / Congress title:
8.12.2012, The 12th International Conference on Advanced Materials and Devices (ICAMD), hybride conference & virtual)
Congress (additional information):
Jeju Island, Korea, 06-10 Dec 2021-12
Year:
2021
Quarter:
4. Quartal
Year / month:
2021-12
Month:
Dec
Language:
en
WWW:
https://www.icamd.or.kr/index.php
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