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Document type:
Konferenzbeitrag
Author(s):
Behlert, R.; Schrag, G.; Wachutka, G.; Wieland, R.; Kutter, C.
Title:
Design of an Integrated Piezoelectric Micro-Flapper Based on Bionic Principles
Pages contribution:
79 - 82
Book / Congress title:
Proceedings of Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS
Date of congress:
2016, May 30 - June 2
Year:
2016
Month:
Jun
Print-ISBN:
978-1-5090-1458-3/16
Language:
en
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